Abstract
Laser-driven expansion of pure-tin microdroplets was demonstrated to produce an efficient and low-debris extreme-ultraviolet (EUV) light source. The pre-expansion is indispensable for resolving the considerable mismatch between the optimal laser spot diameter (∼300μm) and the diameter (∼20μm) of microdroplets containing the minimum-mass Sn fuel for generating the required EUV radiant energy (∼10mJ/pulse). Explosive expansion of microdroplets was attained by using a laser prepulse, whose intensity was at least 3×1011W∕cm2. The expanded microdroplet was irradiated with a CO2 laser pulse to generate EUV light. A combination of low density and long-scale length of the expanded microdroplet leads to a higher EUV energy conversion efficiency (4%) than that (2.5%) obtained from planar Sn targets irradiated by a single CO2 laser pulse. This scheme can be used to produce a practical EUV light source system.
Published Version
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