Abstract
The modern diaphragm vacuum pump is established for the generation of rough and fine vacuum due to very good vacuum technological data such as high pumping speed, high compression ratio, long lifetime of diaphragms and valves, ease of maintenance, totally oilfreeness and its environmental friendliness (especially of the chemistry version). The wider use of diaphragm pumps made it necessary to introduce a new standard for the measurement of the pumping speed of this type of oscillating pump for achieving high accuracy and reproducibility (DIN 28432, Acceptance specifications for diaphragm pumps, Beuth Verlag, Berlin, Germany). With this method pumping speed curves for Helium, Nitrogen and Argon and ultimate pressures for one to four stage diaghragm pumps have been measured and analysed on the basis of turbulent and laminar flow and thermal effects.
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