Abstract
Radioactive 85Kr was used in a closed volume under moderate vacuum to investigate mechanisms by which inert gas atoms are pumped in an electron-impact ionization source of a simple diode design. Results are consistent with a mechanism involving the conversion of inert gas ions into energetic neutrals at the cathode followed by reflection and trapping of some of the neutral atoms in nearby surfaces. We discuss the possibility that the source pumping speed is enhanced due to burial of the trapped neutrals by material released in low-energy sputtering processes. The implications of these results for reducing memory effects in UHV mass spectrometer systems are discussed.
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More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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