Abstract
This article is divided into two parts. Part I deals with the pumping of helium by sputter-ion pumps, where Part II, to follow in a subsequent publication in this journal, deals exclusively with the pumping of hydrogen. In Part I, quantitative data are given for the He speeds and capacities of both noble and conventional diode and triode pumps. The effectiveness of various pump regeneration procedures, subsequent to the pumping of He, is reported. These included bakeout and N2 glow discharge cleaning. The comparative desorption of He with the subsequent pumping of N2 is reported on. The N2 speeds of these pumps were used as the benchmarks for defining the size of the pumps versus their respective He speeds.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
