Abstract
The dynamics of energy coupling, material removal, material transfer and film growth are studied experimentally, theoretically and numerically for PLD of ceramics. Excimer-, Nd:YAG- and CO 2 laser radiation are comparatively investigated as functions of laser parameters and processing variables in order to deposit thin ceramic (Al 2O 3, ZrO 2, SiC, BN, BaTiO 3, Y 1Ba 2Cu 3O 7− δ ) films on various substrates (stainless steel, hard metal, Si, ZrO 2, SrTiO 3). The laser parameters and processing variables produce different vapor and/or plasma states represented in the type, number, momentum and energy of the ensemble of species generated, which are used to deposit thin films with defined properties according to applications in view of their mechanical technical properties, tribologic properties, fatigue and thermal barrier. The results of this fundamental research and applications of thin films are illustrated by examples.
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