Abstract

Ferroelectric SrBi 2Ta 2O 9 (SBTO) thin films were successfully produced on Nb-doped SrTiO 3 and Pt-coated SrTiO 3 substrates by pulsed laser ablation of SrBi 2.5Ta 2O 9 ceramic targets (25 mol% bismuth excess) and a KrF excimer laser. Very weak spontaneous polarization was observed for c-axis-oriented SBTO thin films on Nb-doped SrTiO 3 substrates. For films deposited at 705°C on Pt/Ti/STO (100) substrates, the small signal dielectric constant and dissipation loss factor at 1 kHz were 370 and 0.020, the remnant polarization and coercive field were 4.2 μC/cm 2 and 30 kV/cm at 9 V and 1 kHz, and the decay of remnant polarization at a fatigue measurement was less than 6% up to 10 10 cycles. The effects of film microstructure on the degradation of spontaneous polarization are also discussed.

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