Abstract
Based on our recently proposed grid-enhanced plasma sourceion implantation (GEPSII) technique for inner surface modification ofmaterials with cylindrical geometry, we present the correspondingtheoretical studies of the temporal evolution of the plasma ion sheathbetween the grid electrode and the target in a cylindrical bore. Typicalresults such as the ion sheath evolution, time-dependent ion densityand time-integrated ion energy distribution at the target are calculatedby solving Poisson's equation coupled with fluid equations forcollisionless ions and Boltzmann assumption for electrons using finitedifference methods. The calculated results can further verify thefeasibility and superiority of this new technique.
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