Abstract
The possibility of using of pulsed supersonic gas jets for the formation of high intensity cluster ion beams are discusses. The results of experimental investigations of pulsed gases expansion are generalized in terms of dimensionless similarity parameters. The results of the experimental study of formation of an high-intensity cluster beam of argon are presented. The fundamental phenomenon influences on the main parameters of cluster beam (cluster size, intensity ect.) are considered.
Highlights
Today the beams of atomic or molecular ions are become an integral part of many modern technologies [1]
It was shown that the accelerated gas cluster ion beams have a number of unique advantages that allow them to be considered a promising basis for new technologies, including nanotechnologies [2,3]
The settling time of a free jet is determined by motion of the front part of the nonsteady flow, which depends
Summary
Today the beams of atomic or molecular ions are become an integral part of many modern technologies [1]. A completely different situation occurs during a collision the energetic large clusters with the surface. In this case, nearly simultaneous interaction of many particles of cluster around the same number of atoms in a solid occurs. Nearly simultaneous interaction of many particles of cluster around the same number of atoms in a solid occurs This leads to deposition a high-energy density into a very small volume of the target material, and strong nonlinear effects: lateral sputtering, dry etching, and shallow implantation. Since the course of condensation is determined by the number of particle collisions during expansion, you must increase the gas flow rate from the source, what requires a proportionate growth in the pumping performance of funds. Pulse sources compatible with powerful pulse activation systems: laser, discharge, etc
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