Abstract
A prototype optical bionic microphone with a dual-channel Mach-Zehnder interferometric (MZI) transducer was designed and prepared for the first time using a silicon diaphragm made by microelectromechanical system (MEMS) technology. The MEMS diaphragm mimicked the structure of the fly Ormia Ochracea's coupling eardrum, consisting of two square wings connected through a neck that is anchored via the two torsional beams to the silicon pedestal. The vibrational displacement of each wing at its distal edge relative to the silicon pedestal is detected with one channel of the dual-channel MZI transducer. The diaphragm at rest is coplanar with the silicon pedestal, resulting in an initial phase difference of zero for each channel of the dual-channel MZI transducer and consequently offering the microphone strong temperature robustness. The two channels of the prototype microphone show good consistency in their responses to incident sound signals; they have the rocking and bending resonance frequencies of 482 Hz and 1911 Hz, and their pressure sensitivities at a lower frequency exhibit an "8"-shaped directional dependence. The comparison indicates that the dual-channel MZI transducer-based bionic microphone proposed in this work is advantageous over the Fabry-Perot interferometric transducer-based counterparts extensively reported.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.