Abstract
We report on the fabrication of optical channel waveguides in Nd : YAG ceramics by multi-energy proton implantation at a total dose of 8 × 1016 ions cm−2. The modal distribution of the guided modes obtained from numerical calculation was in good agreement with the experimental result. The propagation loss of the waveguide was determined to be ∼4 dB cm−1 after post-annealing up to 400 °C in air. Confocal micro-photoluminescence experiments have revealed relevant changes in the Nd spectroscopic properties in the waveguide's active volume. These changes include line broadening and shifting as well as a clear luminescence quenching, which were attributed to the strong structural modifications induced by the high-dose proton implantation.
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