Abstract

We report on the fabrication of channel waveguides in Nd:YAG ceramics, using either focused proton beam writing (PBW) or He beam writing (HeBW) techniques. Energies of ions used in the writing process were at 1MeV and 2MeV, respectively, with different writing fluence. High quality channel waveguides were produced in both H+ and He+ implanted regions. Characteristics of the waveguides were explored, and refractive index distribution of the waveguide was reconstructed.

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