Prospects for IC-based micro electromechanical devices.

Abstract

Structural components, actuators, sensors and edectronics are the fundamental components of any robotic system, large or small. Actuators, under the control of the drive and sensor electronics, provide input to move the structural components through specified trajectories. Hence, prerequisites to the successful fabrication of IC-based, multi-components, electromechanical robotic devices are components, actuators and sensors compatible with the processing and materials of IC electronic devices.In this paper, we present a review of such micro electromechanical devices, noting the critical developments in technology and science in the last two years. We begin with a working definition for micro electromechanical systems and briefly describe the origins of the IC-based micro electromechanical systems from the more mature solid-state sensor field. Next we describe silicon surface micromachining, a common technique for the fabrication of many defferent types of passive components and actuators used in micro, electromechanical systems. We follow with a presentation of results from advances in the design, fabrication and testing of IC-based actuators ; specifically the recent work on a variety of side-drive, electrostatic motors. With the components and actuator reviews as a background, we then note the key points from a study which looked into the design and fabrication of an IC-based, planar, three-degree-of-freedom positioner. Finally, we conclude with some remarks on apparent trends and future directions for research in the field of IC-based micro electromechanical systems