Abstract
Problem statement: The electroplating technique is especially interesting due to its low cost, high throughput and high quality of deposit. Magnetic thin films are extensively used in various electronic devices including high density recording media and Micro Electro Mechanical (MEMS) devices. So we examined FePt films and give good magnetic properties. Approach: The Pt-rich FePt alloys were electrodeposited galvanostatically by various temperature baths. Results: The elemental percentage of Pt in the film was very high determined by X-ray spectroscopy. Surface characterization was carried out by using X-Ray Diffractometer (XRD) and Scanning Electron Microscope (SEM).The magnetic properties determined by Vibrating sample magnetometer. Hardness and adhesion of the films were also discussed. Conclusion/Recommendation: The films were soft magnetic character of lower temperature bath and become a hard magnetic character of higher temperature bath. Therefore this magnetic films could be an important material for incorporate in Micro electro mechanical devices.
Highlights
MATERIALS AND METHODSWith the progress in the field of Micro Electro Mechanical System (MEMS) technologies[1,2,3,4,5] there has been growing interest in developing electroplated, nanostructured soft and hard magnetic materials[6,7] for microactuators, micromotors and microswiches
In the present study we investigated in detailed the effects of bath temperature on electrodeposited Pt rich magnetic FePt films of various deposited time and current density
Surface characterization: X-ray diffraction patterns of various FePt electrodeposits produced from various temperature bath like 30, 50 and 70°C for 1.0 mA cm−2 and 30 min were fixed current density and time of deposition respectively for electrodeposition (Fig. 1)
Summary
With the progress in the field of Micro Electro Mechanical System (MEMS) technologies[1,2,3,4,5] there has been growing interest in developing electroplated, nanostructured soft and hard magnetic materials[6,7] for microactuators, micromotors and microswiches. In the present study we investigated in detailed the effects of bath temperature on electrodeposited Pt rich magnetic FePt films of various deposited time and current density. We discussed their structural and magnetic characterization
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