Abstract

The paper is devoted to the reactive deposition of TiN, ZrN and ZrTiN coatings prepared by a cathodic arc ion-plating process. Cathodes made of Ti and Zr were evaporated in an N 2 atmosphere. ZrTiN coatings were created by simultaneous evaporation of both Ti and Zr. Typical operation characteristics of individual depositions are presented. Special attention is devoted to the coating properties, namely to the film microstructure, surface morphology, phase and chemical composition, microhardness and adhesion.

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