Abstract
A diamond-like carbon (DLC) film with a thickness of a few μm was prepared on an aluminum alloy by the hybrid process of plasma-based ion implantation and deposition using acetylene gas. The residual compressive stress of the DLC film determined from the substrate curvature decreased with increasing the negative high voltage for ion implantation and was about 0.2 GPa at the high voltage of −20 kV. Ion implantation also served to produce a graded interface between the DLC film and the substrate material. The relaxation of residual stress in the film allowed us to produce thick DLC films of high adhesion. A wear resistance test by the ball-on-disc method showed that the DLC film on an aluminum alloy substrate had the low friction coefficient of about 0.1.
Published Version
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