Abstract
The effect of oxygen plasma and thermal annealing on electrical and dielectric properties of anodic films Ga 2 O 3 wasinvestigated.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
https://doi.org/10.1109/sibcon.2011.6072653
Copy DOIPublication Date: Sep 1, 2011 |
The effect of oxygen plasma and thermal annealing on electrical and dielectric properties of anodic films Ga 2 O 3 wasinvestigated.
Join us for a 30 min session where you can share your feedback and ask us any queries you have