Properties of multi-walled carbon nanotubes synthesis on porous silicon by double furnace thermal-CVD technique

Abstract

Multi-walled carbon nanotubes (MWCNs) were synthesised using double-furnace thermal chemical vapour deposition technique at 700-900°C on porous silicon nanostructure (PSiNs). Palm oil was used as a carbon natural source, ferrocene as a catalyst and nitrogen gas as a carrier gas. The precursor were vaporised at 475°C carried by nitrogen gas which flow at constant rate of 150 sccm/min. Carbon nanotubes (CNTs) were characterised by using Raman spectroscopy and field emission scanning electron microscopy (FESEM) to check its structure and crystallites before being tested with I-V probe. Au contact was used as a metal contact deposited on CNTs layer. CNTs with uniform diameter were found grown on porous silicon for each temperature used. Based on micro-Raman spectroscopy result, the peak of NTs (around 1,300 to 1,600 nm) was detected. The I-V characteristic of CNTs deposited had different profile when deposited at different temperatures.