Abstract
YBCO thin films have been fabricated by single-target ion-beam deposition methods on MgO and LaAlO/sub 3/ substrates. The best T/sub c/ for YBCO on MgO substrates by the 900 degrees C ex-situ post-annealing process was found to be 80 K. It is believed that the presence of one or more nonsuperconducting phases in the conduction path led to the degradation of T/sub c/ values to levels below those expected for the bulk crystalline material. The best T/sub c/ for YBCO deposited on an LaAlO/sub 3/ substrate, by the in situ process with molecular oxygen and at a substrate temperature of 750 degrees C, was found to be 83 K. The best T/sub c/ using the atomic oxygen process was 80 K. The degradation of these T/sub c/ values below those of the bulk crystalline material is explained by the expansion of c-lattice parameters. The properties of these films were studied through microscopy, stoichiometry, X-ray diffraction, Auger analysis, and T/sub c/ measurements.
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