Abstract
With the aim of evaluating the properties of diamond-like carbon (DLC) films, a comparison is made between tetrahedral amorphous carbon (ta-C) films fabricated by the double-bend-filtered cathodic vacuum arc (FCVA) method using no material gas and hydrogenerated amorphous carbon (a-C:H) films fabricated by the chemical vapor deposition (CVD) method using a hydrocarbon gas. It was found that the ta-C films are superior to the a-C:H films in terms of both wear resistance and combustion resistance. It was also determined that this superiority applies for ultra thin films as well.
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