Abstract
A vacuum ultraviolet fluorine lamp excited by continuous-wave microwave discharge was developed for the first time. This lamp provided a fluorescence spectrum which was comprised of two broad lines centered at 157 and 166 nm. Output performances were investigated in terms of gas mixture and total pressure. A total fluorescence power of 18.9 W was obtained with an intrinsic efficiency of 6.2%, when a microwave power of 310 W was coupled to the plasma.
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