Abstract
Metalorganic vapor infiltration into polymeric substrates is a technique that can be used to modify the bulk interior of the polymer material. Founded within atomic layer deposition processing methodology, vapor infiltration occurs through pulses of a precursor gas and reactant to grow metals or metal oxides within a substrate rather than exclusively depositing on the surface. The infiltration behavior has been shown to vary based on the precursor and reactant exposure sequences. Key application areas have been demonstrated in lithographic patterning, nanostructure formation for catalysis, mechanical enhancement, and optical modification.
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