Propagation modeling and guided waves in a ZnO piezoelectric planar resonator: open-circuit and short-circuit cases

Abstract

This paper presents an application of Legendre polynomial approach to solve the wave propagation in a piezoelectric ZnO planar resonator subjected to stress-free boundary conditions and excited using two thin electrodes connected to an electrical source. The method is able to take into account the boundary conditions, the presence of electrical source and the different dissimilarities of the physical properties. Resonance frequencies of longitudinal modes are calculated in case of an open and short-circuit brunch. Dispersion characteristics are also calculated such as mechanical displacement and stress profiles for different resonance frequencies. The electromechanical coupling coefficient is also calculated.