Abstract
The continued miniaturization and the increased demands on the quality of industrial products stimulate the search for new inspection technologies with enhanced resolution, faster response and improved reliability. However, optical inspection systems often reach their limits in terms of resolution, dynamic range or speed. A promising approach consists in the implementation of model based active measurement strategies. These strategies provide a new degree of flexibility with respect to the solution of challenging measurement and identification problems such as the testing of aspheres, the recognition of material faults, the measurement of dimensional quantities and the non-contact manipulation of tiny particles. But an effective implementation of appropriate algorithms requires also a new degree of freedom in wavefront control. Consequently, sophisticated light switches, light valves and spatial light modulators have become meanwhile key components with respect to an active control of all relevant parameters of the wavefront. This contribution describes several types of modern SLMs, methods for their characterization and some recent applications implemented at ITO.
Published Version
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