Abstract
An MgB2 thin film deposition technology is the first critical step in the development ofsuperconducting electronics utilizing the 39 K superconductor. It turned outto be a challenging task due to the volatility of Mg and phase stability ofMgB2, the low sticking coefficients of Mg at elevated temperatures, and the reactivity of Mg withoxygen. A brief overview of current deposition techniques is provided here from a thermodynamicperspective, with an emphasis on a very successful technique for high quality in situ epitaxialMgB2 films, the hybrid physical–chemical vapour deposition. Examples of heterostructures ofMgB2 with other materials are also presented.
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