PROGRESS IN SIC MATERIALS/DEVICES AND THEIR COMPETITION

Abstract

Power semiconductor devices are important for numerous applications with power conversion being an important one. Wide energy gap semiconductors SiC and GaN have properties that make them attractive for such applications. Among these properties are high thermal conductivity, high breakdown electric field, wide energy gap, low intrinsic carrier concentration, high thermal stability, high saturation velocity and chemical inertness. These lead to low on-resistance, high breakdown voltage, high frequencies, small volume, and small passive inductors and capacitors. These desirable properties are offset by the higher material costs and higher defect densities. Although wide energy gap devices have been in development for many years, only recently have they become available commercially. Their main competition is silicon power devices with breakdown voltages up to 8000 V and very high surge current capacity. However, silicon power devices are approaching their material limits and wide energy gap devices are beginning to have an impact in the power electronics space. SiC has the advantage of substrates with diameters approaching 150 mm and the ability to grow thermal SiO2 . GaN has the heterojunction advantage, but no viable substrate technology. In fact, a large portion of SiC production is used for GaN substrates. GaN material development has also benefited significantly from the development of optical devices, e.g., light-emitting diodes and lasers.