Abstract
Recent progress in both the development of characterization tools for the assessment of surface integrity, and the experimental examination of surface alteration, is reported. Emphasis has been placed on emerging characterization techniques. Examples of newly developed methods, with the potential for assessing surface integrity, are also included. Experimental results on the nature and extent of surface alteration have been presented for the processing of metals, ceramics and glasses, and single crystal materials. Particular attention has been given to characterizing surface and subsurface integrity at fine length scales.
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