Profilometry with compact single-shot low-coherence time-domain interferometry

Abstract

We describe the performance of a compact single-shot low-coherence interferometric scheme that can be capable of measuring three-dimensional surface profiles and shape. This technique utilizes a polarizing Michelson interferometer and a four-channel polarization phase-stepper optics, which is based on a paired wedge prism, a combined wave plate and a Wollaston prism. The coherence gated surface image can be calculated by the simultaneous acquisition of two interferograms and a DC image on a single CCD camera. The image calculation is based on a novel algorithm to calibrate the imbalanced intensity as well as the deviated arbitrary relative phase of each of the imaging channels. The system can display the transverse cross-sectional images in real-time. To demonstrate the feasibility of this system, a Japanese coin is presented as a 3-D shape measurement example with an image size of 4 mm (horizontal) × 4 mm (vertical) × 160 μm (depth).