Abstract

AbstractPreferred crystallographic orientation or texture is a typically observed phenomenon in polycrystalline thin films. In addition, texture was revealed in numerous x-ray diffraction studies to increase with layer thickness. The phenomenon is rather significant for the optimized preparation of thin films, but was difficult to measure so far. A method is presented that allows for texture profiling by exploiting the anomalous variation of the x-ray attenuation coefficient in the vicinity of an elemental absorption edge. The study reports the application of the technique to thin ZnO:Al films by measuring with wavelengths below and above the Zn K edge. Large texture gradients between 0.03 and 0.3 mrd/nm were revealed to arise in these samples. Anomalous diffraction is concluded to enable the determination of texture gradients as required in many thin film projects.KeywordsTilt AngleSurface Acoustic WaveBragg PeakFiber TextureTexture GradientThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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