Abstract
The method of producing nano-dimensional silicon powders from monosilane pyrolysis by compressing in a cyclic process in the flow reactor has been proposed and implemented. The resulting powder has been examined by X-ray diffraction and electron microscopy. The new design solutions and ceramic coatings obtained by using microarc oxidation for the piston-cylinder assembly – a compression unit of the reactor, allowed avoiding the use of compression rings and lubricants and achieving high compression ratio, pressure and temperature in the reactor needed for monosilane pyrolysis. Pyrolysis in the flow reactor is convenient, technological and efficient to be used in the production of high purity silicon nanopowders.
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