Abstract
The method of producing nanopowders of Si and SiC by pyrolysis of a silicon-hydrocarbon mixture by compression in a cyclic process in a flow reactor is proposed and implemented. The obtained powders are characterized by X-ray diffraction and transmission electron microscopy. The new design solutions and use of ceramic coatings obtained by applying microarc oxidation for the piston-cylinder assembly – a compression unit of the reactor - allowed avoiding the use of compression rings and lubricants, achieving a high compression ratio and pressure and temperature in the reactor needed for monosilane pyrolysis. Pyrolysis in the flow reactor is convenient, technological and efficient in terms of its use in the production of high purity nanopowders.
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