Abstract
Ferroelectric thin films of PbTiO 3, (Pb,La)TiO 3 (PLT) and Pb(Zr,Ti)O 3 (PZT) were successfully fabricated using a multi-ion-beam sputtering technique. X-ray diffraction (XRD) measurements demonstrated that the films with perovskite structure were grown on (100)Pt MgO and (111)Pt/Ti/SiO 2/Si substrates at a low substrate temperature of 415°C. The PZT films about 630 Å in thickness exhibited a high dielectric constant of 675 and an excellent ferroelectric P- E hysteresis loop. In order to promote the surface reactions, the substrates were irradiated with XeCl excimer laser beam during the deposition at a room temperature. The results of XRD revealed the formation of perovskite PZT thin films.
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