Process optimization of electrolyte-assisted ultraviolet laser machining of ceramic microhole

Abstract

Electrolyte assisted ultraviolet laser machining (EULM) is presented in this study. First, ceramic material is removed by multiphoton absorption of ultraviolet laser under electrolyte, and ceramic microhole without recast layer is obtained. Meanwhile, the etched material can be carried away by the collapse of cavitation bubbles, and machining quality is higher. Second, process optimization method of EULM is given. The prediction model, which is founded by response surface methodology, is used to analyze the effects of laser process parameters on experimental results. The process optimization model is established based on the prediction values of experimental results. The optimal process scheme is found by simulated annealing algorithm. The experimental results show that the optimization results are reasonable. Moreover, ceramic holes, which are machined by the optimal process parameters, also meet the accuracy requirements.