Abstract
Effective ESD protection circuit design has become challenging due to rapid advances in process technology. This study was launched to address those concerns in deep sub-micron technologies and to look for a process windows that preserve CDM ESD robustness for a given ESD protection designs. Experimental results for 0.18 μm integrated CPU’s together with process window effects on CDM robustness are presented and discussed. The correlation between electrical characteristics and some of the common failure modes are described. It is shown that transistor off current lower than critical value can lead to degradation in time and an eventual secondary breakdown in a parasitic NPN transistor that results in unexpected CDM sensitivity.
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