Process characterization of fabricating 3D micro channel systems by laser-micromachining

Abstract

A novel process technology was developed to create 3D micro channel systems bounded by solid 3D quartz substrates without damaging the bounding surfaces of the substrate. The process uses a Nd:YAG laser to induce thermal energy or plasma to micromachine channels in substrates which are transparent to the spectrum from UV to near IFR wavelength. We have demonstrated that this process is capable of fabricating up to 4 mm long circular cross-section channels with diameters ranging from 25 to 200 μm. The channel diameter can be controlled by a software program that interfaces with the laser system, thus allowing complete channel systems to be designed on a CAD software and then directly fabricated by the laser system. The process technology, process characterization, and initial test results of the fabricated micro channels are presented in this paper.