Abstract
Recently, Dickey has proposed that the two‐probe spreading resistance measured on the surface of a thin, nonuniform, junction‐isolated layer is a linear function of the natural logarithm of the probe separation with a slope proportional to the sheet resistance and an intercept related to the probe radius. Model spreading resistance data generated from the multilayer solution of Laplace's equation were used to test the validity of this relation between spreading resistance and sheet resistance. The model data were meant to simulate diffusions or implants into same conductivity type as well as junction‐isolating substrates. For a junction‐type structure, the model data indicate that probe‐spacing experiments will yield the correct sheet resistance in the surface region, but that the intercept is not related to the radius. The same conclusion is obtained for a heavily doped layer over a substrate of the same conductivity type. For lightly and moderately doped layers over a substrate of the same conductivity type, the relation between the spreading resistance and the sheet resistance is found not to hold.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
