Printed Acoustic Sensor for Low Concentration Volatile Organic Compound Monitoring

Abstract

Printed electronics employing flexible substrate offers prospective features for various applications such as, tactile sensing, energy harvesting, wearable electronics and acoustic wave sensors. In this work, an acoustic FPW (flexural plate wave) sensor is printed on thin and flexible PZT-PDMS (lead zirconate titanate-poly dimethyl siloxane) composite film with silver ink. The prototype FPW resonator has a resonant frequency of 22.65 MHz with an attenuation of -1.552 dBm. Gravimetric mass sensitivity of the sensor was measured by applying PDMS layers in between the input and output interdigital transducers (IDTs). The mass sensitivity was measured to be -7.8 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> /g. The sensor is highly responsive to VOCs (volatile organic compounds) with PDMS as a sensing layer. Gas sensitivities with acetic acid and toluene concentrations were measured to be 0.66 and 160.63 kHz/ppm, respectively. The limit of detection for acetic acid and toluene were 10.9 and 0.03 ppm, respectively. Further, the sensor shows good repeatability and response time with both the VOCs. The thermal stability and high piezoelectric charge coefficient of PZT-PDMS composite compared to other piezoelectric composite and polymer substrates are advantageous for the flexible printed sensor. The reported FPW gas sensor shows potential for low concentration measurement of VOCs.