Abstract
Manganese oxide films for lithium secondary batteries were prepared using a reactive evaporation method. The Mn metal in the crucible suffers severe oxidation during the reactive evaporation process, during which its deposition rate deteriorates with increasing deposition run. So it is difficult to maintain the stoichiometry of films from run to run. To prevent deteriorations, a quartz ampoule has been installed at the bottom of the Mn crucible, which isolated successfully the Mn evaporant from incoming oxygen atoms. It improved the reproducibility of film composition because of stabilizing of the deposition rate. The performance of quartz ampoule was compared with that of Mo separator and stainless steel (SUS) cell.
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