Abstract
The aim of this review is to discuss the effect of different pretreatments on the physical and chemical properties of Indium Tin Oxide (ITO) thin films, as well as device performance towards sensor applications. The emphasis is on the surface science studies of ITO thin films before and after treatment in order to provide connecting points between surface properties with a broader field of materials science of ITO. The morphology of a monolayer deposited on ITO directly affects the surface properties of prepared ITO films. Thus, it is a topic of interest to study the influence pretreatment on the surface morphology of ITO films on device fabrication and applications as a device platform.
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