Abstract
The reactant gas pressure dependence of secondary ion emission from surfaces of polycrystalline Cr, Fe, Co, Mo, Rh, W, Re, and Ir under the action of N2O, NO and NO2 was observed by means of moderate dynamic SIMS. The mass spectra for constant reactant gas pressure indicate the existence of two different groups of transition metals showing either dissociative or partial molecular adsorption behavior. This is confirmed at least above some suitable reactant gas pressure. Besides some special details (Fe/NO; Co/NO) several of the relative secondary ion intensities vs. reactant gas pressure exhibit similar curvature as for O2, thus indicating the NOx gases to be modified sources of oxygen. At higher pressures molecular secondary ions with and without metal atoms come to be appreciable.
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