Abstract
Surface interactions of CClF3 with polycrystalline samples of Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Nb, Mo, Rh, Pd, Ag, Ta, W, Re, Ir, and Pt were investigated by means of moderate dynamic SIMS. As observed with other reactant gases these transition metals in most cases appear to be discernible into “dissociative” and (partial) “molecular” adsorbents. Small signals of oxidic secondary ions which are detectable for residual gas conditions vanished under the action of CClF3. However, due to strong polarization by either of the halogens, the emission of Me2+ ions is enhanced for Ti, V, and Nb.
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