Abstract
SrTiO3 films were deposited using pulsed laser deposition (PLD) at substrate temperatures ranging from 300 °C to 700 °C on a CeO2 layer and nano-Y0.5Gd0.5Ba2Cu3O7-δ buffered CeO2 layer, respectively. The effect of the substrate temperature and substrate film on the crystallinity, preferred orientation, and surface topography were investigated. On the CeO2 layer, there were two preferred SrTiO3 orientations, (00l) and (110). By introducing a nano-Y0.5Gd0.5Ba2Cu3O7-δ layer, pure c-axis oriented SrTiO3 films were obtained at each substrate temperature. Based on the lattice mismatch, three kinds of growth modes of SrTiO3 grains were proposed that were proved by scanning electron microscopy (SEM).
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