Abstract
(Zn,Fe)Fe 2 O 4 thin films have been prepared by MOCVD, applying a novel evaporation method for MO reagents; Zn(acac) 2 and Fe(acac) 3 . These reagents were mixed with a composition of Fe/Zn=0.5-2.0 and were then completely vaporized at 215°C. By the use of single evaporation vessel, the arrangement of MOCVD apparatus has been simple. The vapors with a constant ratio were evolved from the vessel to deposition zone to react with oxygen at 500°C for 30 min. The reproducibility was established on the relationship between mixing ratio and film composition. In addition, high crystallinity was obtained even at 500°C without annealing at higher temperature. The magnetic properties of the Zn 0.73Fe 0.27 Fe 2 O 4 thin film were measured as 38 emu/g and 110 Oe at 25°C.
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