Abstract
The properties of thin gold-film electrodes have been studied to improve the sensitivity and stability of an electrochemical gas sensor for phosphine and arsine. The thin gold-film electrodes are prepared by ion plating on the surface of PTFE (polytetrafluoroethylene) membrane that is etched by an r.f. plasma in Ar gas under various conditions. We have studied the relation between the characteristics of an electrochemical gas sensor and the prepration conditions of the electrode. The gas sensor using the optimum thin gold-film electrode shows a good response and a good linear relation between the sensing current and the concentration of phosphine and arsine. The detection limit (S/N=3) is 0.01 ppm for phosphine and arsine. The sensor maintains a stable sensitivity for a period of six months.
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