Preparation of Textured Growth Pb(Zr,Ti)O 3 Thin Films on Si Substrate Using SrTiO 3 as Buffer Layers

Abstract

PZT thin films are deposited on SiO2/Si substrate by metallo-organic decomposition (MOD) process, using SrTiO3 (STO) as buffer layer for textured growth. The STO layers deposited on SiO2/Si substrate by pulsed laser deposition process show (100)/(200) preferred orientation, whereas the STO buffer layer deposited on silica substrate using spin-coating technique show random orientation behavior. The use of STO as buffer layers enhanced the crystallization and the preferred orientations of the PZT films. The PZT on STO buffered SiO2/Si substrates thus obtained possess high refractive index, (n)PZT/STO = 2.1159, and are of good enough quality for optical waveguide applications.