Abstract
SrTiO3 thin films have been prepared on titanium substrates using strontium acetate solutions in newly constructed flow‐system equipment by the hydrothermal‐electrochemical method. The synthesis parameters (temperature of 120°‐200°C and flow rate of 1‐40 mL/min) allow fabrication of dense, single‐phase films with grain sizes in the range of 80‐340 nm by controlling nucleation and/or growth rates. The flow can be closed, enabling easy recycling of the solutions used. This processing route may serve as an inexpensive and environmentally friendly way of fabrication of single‐phase SrTiO3 thin films as well as functionally graded ferroelectric materials.
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