Preparation of standard samples and standard reference materials for microbeam analysis

Abstract

Metal, alloy and compound films were prepared by vacuum evaporation. Homogeneities of the films were examined by synchrotron radiation-induced X-ray emission (SRIXE) and scanning electron microscope (SEM). Elemental areal densities were determined by tube X-ray fluorescence (XRF), and were checked by NBS standard reference materials. The film samples have been used as standard samples and standard reference materials at Beijing Synchrotron Radiation Facility (BSRF_, Institute of High Energy Physics (IHEP).