Preparation of SrTiO3 thin films on Si(100) substrates by laser ablation: Application as buffer layer for YBa2Cu3O7 films

Abstract

SrTiO3 thin films have been deposited on Si(100) by pulsed laser ablation. The films were characterized by x-ray diffractometry, field emission scanning electron microscopy, and secondary ion mass spectrometry. The films show the (h00) or (hh0) preferential orientations depending on the substrate temperature and oxygen partial pressure during the deposition. Depth profiles indicate that films grow without an important reaction with the substrate. Superconducting YBa2Cu3O7−x thin films were successfully deposited by laser ablation on Si(100) substrates coated with SrTiO3 buffer layer. This indicates that SrTiO3 is a good material as a buffer layer for deposition of YBa2Cu3O7−x on silicon.