Preparation of PZT Thin Films by Liquid-Source MOCVD Using of Cyclohexane Solvent

Abstract

Pb(Zr, Ti)O3 thin films were grown on 8-inch Ir(111)/SiO2/Si substrate by a MOCVD system aiming at application utilizing high-density ferroelectric memory (FRAM). Two types of solvents, THF and cyclohexane were used for liquid source delivery. It was found that the ferroelectric properties of the MOCVD-PZT films using cyclohexane solvent were better than them using THF solvent. By choosing cyclohexane as solvent, the MOCVD-PZT thin films showed strong ⟨111⟩ preferred orientation and the Pt/PZT/Ir capacitors exhibited promising ferroelectric performances, for instance, large switching charge (Qsw) of 56.4 uC/cm2.