Abstract
In this study, nanosized molybdenum powder was synthesized by the microwave plasma chemical vapor deposition (MPCVD) method, a novel chemical synthesis technology. The mechanism of the MPCVD process and the effects of some processing parameters on the characteristics of Mo powder were studied. The results show that the mean particle size depends greatly on the output power of microwave, the flow rate of plasma forming gas, the flow rate of the carrier gas and the feeding rate of raw materials. The ratio of the flow rate of the carrier gas ( K) to the feeding rate of raw materials ( V) is the main factor that has great influence on the particle size distribution.
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