Preparation of metallic nanopore arrays using template-guided electrochemical etching

Abstract

For the first time, preparation of metallic nanopore arrays using anodic aluminum oxide membrane template-guided electrochemical etching technique was reported. The procedure consists of four main steps, sputtering of a conductive layer, thickening of the conductive layer by electroplating, template-guided etching of the electroplated metal layer along the nanopores in the anodic aluminum oxide, and removing of the anodic aluminum oxide template. Scanning electronic microscopy, X-ray diffraction and X-ray photoelectron spectroscopy were used for characterization of the Au nanopore arrays, which proved that the nanopores in the Au matrix were generated due to template-guided electrochemical etching. This method can be used for preparation of double-layered nanostructure with through nanopores penetrating the top insulating layer and the bottom conducting layer.